Optimization of the distillation process of trichlorosilane using the response surface method

LI QunSheng;WANG XiangYu

Journal of Beijing University of Chemical Technology ›› 2015, Vol. 42 ›› Issue (1) : 16-20.

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Journal of Beijing University of Chemical Technology ›› 2015, Vol. 42 ›› Issue (1) : 16-20.
化学与化学工程

Optimization of the distillation process of trichlorosilane using the response surface method

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