Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor

NIU YanJun;SHAO XiaoHong;WANG ZhiQiang

Journal of Beijing University of Chemical Technology ›› 2014, Vol. 41 ›› Issue (1) : 106-110.

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Journal of Beijing University of Chemical Technology ›› 2014, Vol. 41 ›› Issue (1) : 106-110.
机电工程和信息科学

Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 41(1): 106-110

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