Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor

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Journal of Beijing University of Chemical Technology ›› 2014, Vol. 41 ›› Issue (1) : 106-110.

机电工程和信息科学

NIU YanJun;SHAO XiaoHong;WANG ZhiQiang

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In this paper, a new microwave plasma reactor for a coaxial resonator has been designed. The electromagnetic distribution in the resonant cavity has been calculated, and the resonant cavity electromagnetic field distribution formula and the corresponding field intensity distribution have been obtained. The electric field in the coaxial resonator has been simulated and optimized by using HFSS software. The simulated results are consistent with theoretical calculations, and are therefore reasonable and reliable. The new resonator has valuable properties such as a high intrinsic Q factor of 17800, a high field strength of 9.29×10³V/(m·W) and good concentration of microwave energy, which make it easier for the reactant gas to discharge.

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NIU YanJun;SHAO XiaoHong;WANG ZhiQiang. Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor[J]. Journal of Beijing University of Chemical Technology, 2014, 41(1): 106-110

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Received	Revised	Published
2013-09-06	1900-01-01	2014-01-20
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2014-01-20

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