PDF(954 KB)
Simulation and optimization of the trichlorosilane distillation process
LI QunShen1;BAI Jie1;GUO ZengChang2;WANG BaoHua3
Journal of Beijing University of Chemical Technology ›› 2012, Vol. 39 ›› Issue (1) : 1-05.
PDF(954 KB)
PDF(954 KB)
Simulation and optimization of the trichlorosilane distillation process
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