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一种同轴腔微波等离子体反应器的设计及电磁场计算
牛雁军;邵晓红;*王治强
Calculation and design of the electromagnetic field in a coaxial resonator microwave plasma reactor
NIU YanJun;SHAO XiaoHong;WANG ZhiQiang
. 2014, (1): 106 -110 .