A method to optimize the uniformity of a polishing spot by adjusting the compression height of the polishing tool based on the curvature of the workpiece
CAO Cong,PAN Ri,ZHANG YaJun,ZHUANG Jian,DONG LiQun
Journal of Beijing University of Chemical Technology ›› 2016, Vol. 43 ›› Issue (3) : 104-109.
A method to optimize the uniformity of a polishing spot by adjusting the compression height of the polishing tool based on the curvature of the workpiece
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